P

Inventor

DE JONGH ROBERTUS JOHANNES MARINUS

NL8 patents
⚠️ This page may combine multiple inventors who share the name “DE JONGH ROBERTUS JOHANNES MARINUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents
US9857698B2Jan 2, 2018

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations65
US10248027B2Apr 2, 2019

Projection system

ASML NETHERLANDS BV1 citations56
US11550227B2Jan 10, 2023

Projection system and lithographic apparatus comprising said projection system

ASML NETHERLANDS BV0 citations54

BUTLER HANS

2 patents
US8144310B2Mar 27, 2012

Positioning system, lithographic apparatus and device manufacturing method

BUTLER HANS5 citations71
US9122173B2Sep 1, 2015

Positioning system, lithographic apparatus and device manufacturing method

BUTLER HANS1 citations50

ZEISS CARL SMT GMBH

1 patent
US9304404B2Apr 5, 2016

Arrangement for actuating an element in a microlithographic projection exposure apparatus

ZEISS CARL SMT GMBH5 citations72

LOOPSTRA ERIK ROELOF

1 patent
US9164401B2Oct 20, 2015

Projection system and lithographic apparatus

LOOPSTRA ERIK ROELOF2 citations62

GROENEVELD ROGIER HERMAN MATHIJS

1 patent
US8908144B2Dec 9, 2014

Lithographic apparatus and device manufacturing method

GROENEVELD ROGIER HERMAN MATHIJS3 citations51