Inventor
VAN DER WIJST MARC WILHELMUS MARIA
NL37 patents
⚠️ This page may combine multiple inventors who share the name “VAN DER WIJST MARC WILHELMUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
17 patentsUS7903866B2Mar 8, 2011
Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object
ASML NETHERLANDS BV16 citations92
US7436484B2Oct 14, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations92
US11150560B2Oct 19, 2021
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10732511B2Aug 4, 2020
Projection system and mirror and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10216093B2Feb 26, 2019
Projection system and minor and radiation source for a lithographic apparatus
ASML NETHERLANDS BV1 citations73
US10191393B2Jan 29, 2019
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations71
US9696630B2Jul 4, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations71
US7554105B2Jun 30, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations70
US10146133B2Dec 4, 2018
Lithographic apparatus and method
ASML NETHERLANDS BV2 citations66
US8368868B2Feb 5, 2013
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless
ASML NETHERLANDS BV2 citations62
US7999914B2Aug 16, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US10649347B2May 12, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations57
US7804579B2Sep 28, 2010
Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product
ASML NETHERLANDS BV4 citations57
US9494869B2Nov 15, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US10114299B2Oct 30, 2018
Lithographic apparatus
ASML NETHERLANDS BV0 citations46
US10551751B2Feb 4, 2020
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations42
US10409175B2Sep 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations38
BUTLER HANS
13 patentsUS8164737B2Apr 24, 2012
Lithographic apparatus having an active damping subassembly
BUTLER HANS11 citations82
US9715171B2Jul 25, 2017
Imprint lithographic apparatus and imprint lithographic method
BUTLER HANS4 citations71
US8144310B2Mar 27, 2012
Positioning system, lithographic apparatus and device manufacturing method
BUTLER HANS5 citations71
US9378722B2Jun 28, 2016
Lithographic apparatus with actuator to compensate acoustic vibration
BUTLER HANS6 citations70
US8553199B2Oct 8, 2013
Lithographic apparatus and device manufacturing method
BUTLER HANS6 citations70
US8619232B2Dec 31, 2013
Method for damping an object, an active damping system, and a lithographic apparatus
BUTLER HANS3 citations63
US8994919B2Mar 31, 2015
Lithographic apparatus and device manufacturing method
BUTLER HANS2 citations62
US8245824B2Aug 21, 2012
Combination of structure and an active damping system, and a lithographic apparatus
BUTLER HANS4 citations60
US8243258B2Aug 14, 2012
Lithographic apparatus having acoustic resonator
BUTLER HANS5 citations60
US8059259B2Nov 15, 2011
Damping arrangement, active damping system, lithographic apparatus, and projection assembly
BUTLER HANS6 citations60
US9122173B2Sep 1, 2015
Positioning system, lithographic apparatus and device manufacturing method
BUTLER HANS1 citations50
US8781775B2Jul 15, 2014
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus
BUTLER HANS0 citations41
US8493553B2Jul 23, 2013
Lithographic apparatus having a feed forward pressure pulse compensation for the metrology frame
BUTLER HANS0 citations41
VAN DER WIJST MARC WILHELMUS MARIA
3 patentsUS8203694B2Jun 19, 2012
Lithographic apparatus, projection assembly and active damping
VAN DER WIJST MARC WILHELMUS MARIA3 citations60
US9134632B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
VAN DER WIJST MARC WILHELMUS MARIA3 citations58
US8457385B2Jun 4, 2013
Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object
VAN DER WIJST MARC WILHELMUS MARIA0 citations50