Inventor
WIJCKMANS MAURICE WILLEM JOZEF ETIËNNE
NL13 patents
⚠️ This page may combine multiple inventors who share the name “WIJCKMANS MAURICE WILLEM JOZEF ETIËNNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10209634B2Feb 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations72
US9500953B2Nov 22, 2016
Radiation source
ASML NETHERLANDS BV4 citations71
US10578983B2Mar 3, 2020
Lithographic apparatus having an active base frame support
ASML NETHERLANDS BV2 citations68
US10955761B2Mar 23, 2021
Lithographic apparatus, lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US10866529B2Dec 15, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US11269262B2Mar 8, 2022
Frame assembly, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US11169450B2Nov 9, 2021
Pneumatic support device and lithographic apparatus with pneumatic support device
ASML NETHERLANDS BV0 citations48
US10962890B2Mar 30, 2021
Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method
ASML NETHERLANDS BV0 citations45
US10838312B2Nov 17, 2020
Lithographic apparatus, lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations39
US10503086B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations37