Inventor

LEE HUCHENG

US25 patents

⚠️ This page may combine multiple inventors who share the name “LEE HUCHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEE HUCHENG

KLA TENCOR CORP

High sensitivity repeater defect detection

Method and system for correlating optical images with scanning electron microscopy images

Visual feedback for inspection algorithms and filters

Capture of repeater defects on a semiconductor wafer

Method and system for correlating optical images with scanning electron microscopy images

Adaptive local threshold and color filtering

Inspection for specimens with extensive die to die process variation

Defect detection using structural information

Adaptive local threshold and color filtering

Optical-mode selection for multi-mode semiconductor inspection

Intra-die defect detection

Determining a position of a defect in an electron beam image

Defect-location determination using correction loop for pixel alignment

Systems and methods of using z-layer context in logic and hot spot inspection for sensitivity improvement and nuisance suppression

System and method for defining care areas in repeating structures of design data

Automatic recipe stability monitoring and reporting

KLA CORP

Controlling a process for inspection of a specimen

Design-assisted inspection for DRAM and 3D NAND devices

Detecting defects in a logic region on a wafer

Design-assisted inspection for DRAM and 3D NAND devices

Clustering sub-care areas based on noise characteristics

Image contrast metrics for deriving and improving imaging conditions

Selecting defect detection methods for inspection of a specimen

Robust image-to-design alignment for dram

Print check repeater defect detection