Inventor
TSAI LIEN-YAO
TW19 patents
Patents
19 patentsUS10155660B2Dec 18, 2018
Device and method for protecting FEOL element and BEOL element
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations82
US10343895B2Jul 9, 2019
Micro-electro-mechanical system (MEMS) structure including isolation ring at sidewalls of semiconductor via and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10150664B2Dec 11, 2018
Microelectromechanical systems (MEMS) stopper structure for stiction improvement
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9926190B2Mar 27, 2018
MEMS devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9540231B2Jan 10, 2017
MEMS device with a bonding layer embedded in the cap
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12297103B2May 13, 2025
Device for protecting FEOL element and BEOL element
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11345591B2May 31, 2022
Device for protecting FEOL element and BEOL element
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10981779B2Apr 20, 2021
MEMS devices and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11513287B2Nov 29, 2022
Waveguide structure and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11062903B2Jul 13, 2021
Method and apparatus for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10865100B2Dec 15, 2020
Method for forming micro-electro-mechanical system (MEMS) structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10266400B2Apr 23, 2019
MEMS device with multi pressure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10112822B2Oct 30, 2018
Semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US9868630B2Jan 16, 2018
Package structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9764948B2Sep 19, 2017
MEMS cap with multi pressure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10712500B2Jul 14, 2020
Semiconductor device and manufacturing method of the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10508028B2Dec 17, 2019
Device for protecting FEOL element and BEOL element
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10777733B2Sep 15, 2020
Method and apparatus for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45
US10861929B2Dec 8, 2020
Electronic device including a capacitor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41