Inventor
KIM SEONGSUE
KR12 patents
⚠️ This page may combine multiple inventors who share the name “KIM SEONGSUE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS10401602B2Sep 3, 2019
EUV light generator including collecting mirror having drip hole
SAMSUNG ELECTRONICS CO LTD5 citations71
US9466490B2Oct 11, 2016
Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices
SAMSUNG ELECTRONICS CO LTD4 citations70
US11635371B2Apr 25, 2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method
SAMSUNG ELECTRONICS CO LTD3 citations69
US10719008B2Jul 21, 2020
Phase-shift mask for extreme ultraviolet lithography
SAMSUNG ELECTRONICS CO LTD2 citations69
US11852583B2Dec 26, 2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method
SAMSUNG ELECTRONICS CO LTD0 citations58
US11774846B2Oct 3, 2023
Phase shift masks for extreme ultraviolet lithography
SAMSUNG ELECTRONICS CO LTD0 citations58
US11487197B2Nov 1, 2022
Phase shift masks for extreme ultraviolet lithography
SAMSUNG ELECTRONICS CO LTD0 citations58
US11372323B2Jun 28, 2022
Phase-shift mask for extreme ultraviolet lithography
SAMSUNG ELECTRONICS CO LTD0 citations58
US10126642B2Nov 13, 2018
Reflective photomask, method of fabricating the same, and exposure apparatus using the reflective photomask
SAMSUNG ELECTRONICS CO LTD1 citations50
US12099293B2Sep 24, 2024
Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations48
US9996001B2Jun 12, 2018
Reticle and exposure apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations40