Inventor

WANG JEN-SHIANG

US22 patents

⚠️ This page may combine multiple inventors who share the name “WANG JEN-SHIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WANG JEN-SHIANG

ASML NETHERLANDS BV

Method and apparatus for design of a metrology target

Metrology method and apparatus

Method and apparatus for design of a metrology target

Method and apparatus for design of a metrology target

Substrate measurement recipe configuration to improve device matching

Process based metrology target design

Methods of determining process models by machine learning

Utilize machine learning in selecting high quality averaged SEM images from raw images automatically

Method for improving a process for a patterning process

Etch bias characterization and method of using the same

Method and apparatus for inspection and metrology

Etch bias characterization and method of using the same

Method and apparatus for inspection and metrology

Machine learning based image generation for model base alignments

Method for patterning process modelling

Process based metrology target design

Methods of tuning process models

Method for determining stochastic variation of printed patterns

Selection of substrate measurement recipes

Method for training or using a process model for determining a pattern in a patterning process

UNIV LELAND STANFORD JUNIOR

Elastomer spatial light modulators for extreme ultraviolet lithography

ENGELEN ADRIANUS FRANSISCUS PETRUS

Method of controlling a lithographic apparatus, device manufacturing method, lithographic apparatus, computer program product and method of improving a mathematical model of a lithographic process