Inventor
KIMIZUKA Heita
JP13 patents
Patents
13 patentsUS11043359B2Jun 22, 2021
Charged particle beam apparatus and charged particle beam inspection system
HITACHI HIGH TECH CORP14 citations85
US11398367B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP4 citations72
US11398366B2Jul 26, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US12394041B2Aug 19, 2025
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations62
US12001521B2Jun 4, 2024
Adjusting method of charged particle beam device and charged particle beam device system
HITACHI HIGH TECH CORP0 citations62
US11749494B2Sep 5, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP1 citations62
US11694325B2Jul 4, 2023
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations62
US11646172B2May 9, 2023
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations62
US12450715B2Oct 21, 2025
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations61
US11776103B2Oct 3, 2023
System for deriving electrical characteristics and non-transitory computer-readable medium
HITACHI HIGH TECH CORP0 citations61
US11335535B2May 17, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations51
US11232929B2Jan 25, 2022
Method for determining irradiation conditions for charged particle beam device and charged particle beam device
HITACHI HIGH TECH CORP0 citations48
US12512294B2Dec 30, 2025
Charged particle beam device
HITACHI HIGH TECH CORP0 citations45