Inventor
AYDIN AYKUT
US14 patents
Patents
14 patentsUS11640905B2May 2, 2023
Plasma enhanced deposition of silicon-containing films at low temperature
APPLIED MATERIALS INC2 citations72
US11618949B2Apr 4, 2023
Methods to reduce material surface roughness
APPLIED MATERIALS INC2 citations72
US12482646B2Nov 25, 2025
Processes for depositing SiB films
APPLIED MATERIALS INC0 citations62
US12205818B2Jan 21, 2025
Boron concentration tunability in boron-silicon films
APPLIED MATERIALS INC0 citations62
US12077852B2Sep 3, 2024
Metal-doped boron films
APPLIED MATERIALS INC0 citations62
US11961739B2Apr 16, 2024
Boron concentration tunability in boron-silicon films
APPLIED MATERIALS INC0 citations62
US11939674B2Mar 26, 2024
Methods to reduce material surface roughness
APPLIED MATERIALS INC0 citations62
US12033848B2Jul 9, 2024
Processes for depositing sib films
APPLIED MATERIALS INC0 citations61
US12568791B2Mar 3, 2026
Controlling concentration profiles for deposited films using machine learning
APPLIED MATERIALS INC0 citations60
US12142480B2Nov 12, 2024
Seam removal in high aspect ratio gap-fill
APPLIED MATERIALS INC0 citations59
US11676813B2Jun 13, 2023
Doping semiconductor films
APPLIED MATERIALS INC0 citations51
US11532525B2Dec 20, 2022
Controlling concentration profiles for deposited films using machine learning
APPLIED MATERIALS INC0 citations50
US11827514B2Nov 28, 2023
Amorphous silicon-based films resistant to crystallization
APPLIED MATERIALS INC0 citations49
US12550651B2Feb 10, 2026
Selective etching of silicon-containing material relative to metal-doped boron films
APPLIED MATERIALS INC0 citations48