Inventor

SATAKE AKEMI

JP3 patents

Patents

3 patents

US4987005AJan 22, 1991

Chemical vapor processing method for deposition or etching on a plurality of substrates

SEMICONDUCTOR ENERGY LAB31 citations92

US5039928AAug 13, 1991

Accumulator for portable computers

SEMICONDUCTOR ENERGY LAB51 citations90

US5035753AJul 30, 1991

Photoelectric conversion device

SEMICONDUCTOR ENERGY LAB13 citations72