Inventor
YANO KOHSAKU
JP8 patents
Patents
8 patentsUS5125358AJun 30, 1992
Microwave plasma film deposition system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD353 citations98
US5327012AJul 5, 1994
Semiconductor device having a double-layer interconnection structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD60 citations96
US4977104ADec 11, 1990
Method for producing a semiconductor device by filling hollows with thermally decomposed doped and undoped polysilicon
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD97 citations95
US5180436AJan 19, 1993
Microwave plasma film deposition system
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD24 citations92
US5076877ADec 31, 1991
Apparatus for dry etching
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD15 citations73
US5198884AMar 30, 1993
Semiconductor devices having a double-layer interconnection structure
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD2 citations62
US5132748AJul 21, 1992
Semiconductor memory device
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations61
US4661830AApr 28, 1987
Solid state imager
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD1 citations51