Inventor
TSUTAHARA KOUICHIROU
JP9 patents
Patents
9 patentsUS5534073AJul 9, 1996
Semiconductor producing apparatus comprising wafer vacuum chucking device
MITSUBISHI ELECTRIC CORP213 citations98
US5976260ANov 2, 1999
Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus
MITSUBISHI ELECTRIC CORP48 citations95
US5803938ASep 8, 1998
Liquid vaporizing apparatus
MITSUBISHI ELECTRIC CORP50 citations94
US5520858AMay 28, 1996
Liquid vaporizing apparatus
MITSUBISHI ELECTRIC CORP68 citations94
US6568996B2May 27, 2003
Polishing agent for processing semiconductor, dispersant used therefor and process for preparing semiconductor device using above polishing agent for processing semiconductor
MITSUBISHI ELECTRIC CORP38 citations92
US5025133AJun 18, 1991
Semiconductor wafer heating device
MITSUBISHI ELECTRIC CORP37 citations92
US5076207ADec 31, 1991
Apparatus for atmospheric chemical vapor deposition
MITSUBISHI ELECTRIC CORP10 citations73
US5785902AJul 28, 1998
Liquid vaporizing apparatus
MITSUBISHI ELECTRIC CORP8 citations72
US5662838ASep 2, 1997
Liquid vaporizing apparatus
MITSUBISHI ELECTRIC CORP6 citations72