P

Inventor

RIEF KLAUS

DE12 patents
⚠️ This page may combine multiple inventors who share the name “RIEF KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

4 patents
US7304717B2Dec 4, 2007

Imaging device in a projection exposure facility

ZEISS CARL SMT AG12 citations91
US7486382B2Feb 3, 2009

Imaging device in a projection exposure machine

ZEISS CARL SMT AG8 citations82
US7710542B2May 4, 2010

Imaging device in a projection exposure machine

ZEISS CARL SMT AG7 citations72
US7609464B2Oct 27, 2009

Holding device for an optical element with support force equalization

ZEISS CARL SMT AG6 citations54

ZEISS CARL SMT GMBH

3 patents
US7961294B2Jun 14, 2011

Imaging device in a projection exposure facility

ZEISS CARL SMT GMBH6 citations72
US8879046B2Nov 4, 2014

Method for moving an optical element of a projection exposure apparatus for microlithography

ZEISS CARL SMT GMBH3 citations55
US12547086B2Feb 10, 2026

Projection exposure apparatus for semiconductor lithography

ZEISS CARL SMT GMBH0 citations50

ZAHNRADFABRIK FRIEDRICHSHAFEN

2 patents
US5839527ANov 24, 1998

Multi-axle steering system for vehicles

ZAHNRADFABRIK FRIEDRICHSHAFEN17 citations83
US5799259AAug 25, 1998

Vehicle with steerable front and rear wheels

ZAHNRADFABRIK FRIEDRICHSHAFEN17 citations83

VOGLER ALEXANDER

1 patent
US9513452B2Dec 6, 2016

Damping device

VOGLER ALEXANDER7 citations73

RIEF KLAUS

1 patent
US8199315B2Jun 12, 2012

Projection objective for semiconductor lithography

RIEF KLAUS4 citations56

HUMMEL WOLFGANG

1 patent
US8514371B2Aug 20, 2013

Imaging device in a projection exposure facility

HUMMEL WOLFGANG0 citations46