Inventor
SOININEN PEKKA T
FI19 patents
⚠️ This page may combine multiple inventors who share the name “SOININEN PEKKA T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INT
11 patentsUS7156380B2Jan 2, 2007
Safe liquid source containers
ASM INT506 citations99
US6686271B2Feb 3, 2004
Protective layers prior to alternating layer deposition
ASM INT245 citations99
US7971861B2Jul 5, 2011
Safe liquid source containers
ASM INT43 citations98
US6861334B2Mar 1, 2005
Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition
ASM INT88 citations98
US6699783B2Mar 2, 2004
Method for controlling conformality with alternating layer deposition
ASM INT47 citations96
US7497420B2Mar 3, 2009
Safe liquid source containers
ASM INT18 citations92
US7037372B2May 2, 2006
Method of growing a thin film onto a substrate
ASM INT17 citations92
US7018478B2Mar 28, 2006
Method of growing a thin film onto a substrate
ASM INT23 citations92
US6783590B2Aug 31, 2004
Method of growing a thin film onto a substrate
ASM INT23 citations92
US7833352B2Nov 16, 2010
Apparatus for fabrication of thin films
ASM INT14 citations91
US7276774B2Oct 2, 2007
Trench isolation structures for integrated circuits
ASM INT2 citations63
ASM MICROCHEMISTRY OY
7 patentsUS6482733B2Nov 19, 2002
Protective layers prior to alternating layer deposition
ASM MICROCHEMISTRY OY406 citations99
US6759325B2Jul 6, 2004
Sealing porous structures
ASM MICROCHEMISTRY OY169 citations98
US6447607B2Sep 10, 2002
Apparatus for growing thin films
ASM MICROCHEMISTRY OY143 citations98
US6562140B1May 13, 2003
Apparatus for fabrication of thin films
ASM MICROCHEMISTRY OY107 citations97
US6579374B2Jun 17, 2003
Apparatus for fabrication of thin films
ASM MICROCHEMISTRY OY80 citations96
US6881263B2Apr 19, 2005
Method of growing a thin film onto a substrate
ASM MICROCHEMISTRY OY35 citations92
US6689210B2Feb 10, 2004
Apparatus for growing thin films
ASM MICROCHEMISTRY OY6 citations73