Inventor

FUJISAKI NOBUO

JP3 patents

Patents

3 patents

US6362884B1Mar 26, 2002

Apparatus for inspecting a substrate

OLYMPUS OPTICAL CO18 citations89

US6707546B2Mar 16, 2004

Apparatus for inspecting a substrate

OLYMPUS OPTICAL CO6 citations71

US6671041B2Dec 30, 2003

Apparatus for inspecting a substrate

OLYMPUS OPTICAL CO11 citations71