Inventor
PFITZNER LOTHAR
DE10 patents
⚠️ This page may combine multiple inventors who share the name “PFITZNER LOTHAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FRAUNHOFER GES FORSCHUNG
6 patentsUS6928892B2Aug 16, 2005
Configuration for determining a concentration of contaminating particles in a loading and unloading chamber of an appliance for processing at least one disk-like object
FRAUNHOFER GES FORSCHUNG22 citations90
US6622101B1Sep 16, 2003
Quality surveillance of a production process
FRAUNHOFER GES FORSCHUNG32 citations86
US7003149B2Feb 21, 2006
Method and device for optically monitoring fabrication processes of finely structured surfaces in a semiconductor production
FRAUNHOFER GES FORSCHUNG13 citations83
US7000454B2Feb 21, 2006
Particle measurement configuration and semiconductor wafer processing device with such a configuration
FRAUNHOFER GES FORSCHUNG10 citations71
US6089548AJul 18, 2000
Process and device for converting a liquid stream flow into a gas stream flow
FRAUNHOFER GES FORSCHUNG9 citations71
US6784445B2Aug 31, 2004
Apparatus for monitoring intentional or unavoidable layer depositions and method
FRAUNHOFER GES FORSCHUNG1 citations49
MARELLI AUTOMOTIVE LIGHTING REUTLINGEN GERMANY GMBH
2 patentsUS12000554B2Jun 4, 2024
Lighting apparatus for a motor vehicle and assembly of the components of the lighting apparatus
MARELLI AUTOMOTIVE LIGHTING REUTLINGEN GERMANY GMBH0 citations46
US11988352B2May 21, 2024
Light module, motor vehicle light assembly, and production method
MARELLI AUTOMOTIVE LIGHTING REUTLINGEN GERMANY GMBH0 citations40