Inventor
MATSUDA KATSUHIKO
JP3 patents
Patents
3 patentsUS6269279B1Jul 31, 2001
Control system
TOKYO ELECTRON LTD52 citations89
US7035768B2Apr 25, 2006
Method for collecting remote maintenance and diagnostic data from subject equipment, other device and manufacturing execution system
TOKYO ELECTRON LTD22 citations87
US9256221B2Feb 9, 2016
Information processing apparatus, processing system, processing method, and program
TOKYO ELECTRON LTD4 citations69