Inventor
NISHIHARA EIJI
JP4 patents
Patents
4 patentsUS7206074B2Apr 17, 2007
Apparatus and method for measuring spectral reflectance and apparatus for measuring film thickness
DAINIPPON SCREEN MFG43 citations91
US7480407B2Jan 20, 2009
Surface region identification by image area segmentation
DAINIPPON SCREEN MFG11 citations82
US7003148B2Feb 21, 2006
Detection of an end point of polishing a substrate
DAINIPPON SCREEN MFG4 citations61
US7463763B2Dec 9, 2008
Apparatus, method, and program for assisting in selection of pattern element for pattern matching
DAINIPPON SCREEN MFG4 citations57