Inventor

MOORING BEN

US8 patents

⚠️ This page may combine multiple inventors who share the name “MOORING BEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US6428394B1Aug 6, 2002

Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed

LAM RES CORP65 citations94

US7486878B2Feb 3, 2009

Offset correction methods and arrangement for positioning and inspecting substrates

LAM RES CORP25 citations91

US7479236B2Jan 20, 2009

Offset correction techniques for positioning substrates

LAM RES CORP20 citations91

APPLIED MATERIALS INC

2 patents

US6312525B1Nov 6, 2001

Modular architecture for semiconductor wafer fabrication equipment

APPLIED MATERIALS INC693 citations94

US5789878AAug 4, 1998

Dual plane robot

APPLIED MATERIALS INC77 citations94

MOORING BEN

2 patents

US8328942B2Dec 11, 2012

Wafer heating and temperature control by backside fluid injection

MOORING BEN7 citations81

US8591665B2Nov 26, 2013

Wafer heating and temperature control by backside fluid injection

MOORING BEN0 citations49

CHEN JACK

1 patent

US8135485B2Mar 13, 2012

Offset correction techniques for positioning substrates within a processing chamber

CHEN JACK10 citations82