Inventor

CAIN STEPHEN J

US3 patents

⚠️ This page may combine multiple inventors who share the name “CAIN STEPHEN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US7486878B2Feb 3, 2009

Offset correction methods and arrangement for positioning and inspecting substrates

LAM RES CORP25 citations91

US7479236B2Jan 20, 2009

Offset correction techniques for positioning substrates

LAM RES CORP20 citations91

CHEN JACK

1 patent

US8135485B2Mar 13, 2012

Offset correction techniques for positioning substrates within a processing chamber

CHEN JACK10 citations82