Inventor
FUJITA TAKEHIKO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “FUJITA TAKEHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7648895B2Jan 19, 2010
Vertical CVD apparatus for forming silicon-germanium film
TOKYO ELECTRON LTD337 citations98
US7906168B2Mar 15, 2011
Film formation method and apparatus for forming silicon oxide film
TOKYO ELECTRON LTD50 citations94
US7179334B2Feb 20, 2007
System and method for performing semiconductor processing on substrate being processed
TOKYO ELECTRON LTD14 citations84
US7938080B2May 10, 2011
Method for using film formation apparatus
TOKYO ELECTRON LTD8 citations83
US7494943B2Feb 24, 2009
Method for using film formation apparatus
TOKYO ELECTRON LTD10 citations83
US7795158B2Sep 14, 2010
Oxidation method and apparatus for semiconductor process
TOKYO ELECTRON LTD7 citations74
US7273818B2Sep 25, 2007
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD7 citations73
US7211514B2May 1, 2007
Heat-processing method for semiconductor process under a vacuum pressure
TOKYO ELECTRON LTD3 citations62
DOWA ELECTRONICS MATERIALS CO LTD
8 patentsUS10283671B2May 7, 2019
Method of producing III nitride semiconductor light-emitting device
DOWA ELECTRONICS MATERIALS CO LTD2 citations73
US10193016B2Jan 29, 2019
III-nitride semiconductor light emitting device and method of producing the same
DOWA ELECTRONICS MATERIALS CO LTD5 citations73
US10147842B2Dec 4, 2018
Method of producing III nitride semiconductor light-emitting device
DOWA ELECTRONICS MATERIALS CO LTD5 citations73
US9882088B2Jan 30, 2018
III nitride semiconductor light-emitting device
DOWA ELECTRONICS MATERIALS CO LTD2 citations73
US12507504B2Dec 23, 2025
Group III nitride semiconductor light-emitting element and method of manufacturing same
DOWA ELECTRONICS MATERIALS CO LTD0 citations62
US11024769B2Jun 1, 2021
Group III nitride semiconductor light-emitting element and method of manufacturing same
DOWA ELECTRONICS MATERIALS CO LTD0 citations62
US10573783B2Feb 25, 2020
Group III nitride semiconductor light-emitting element and method of manufacturing same
DOWA ELECTRONICS MATERIALS CO LTD0 citations52
US10062806B2Aug 28, 2018
Method of producing III nitride semiconductor light-emitting device and III nitride semiconductor light-emitting device
DOWA ELECTRONICS MATERIALS CO LTD0 citations42