Inventor
KIMURA NORIFUMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KIMURA NORIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7648895B2Jan 19, 2010
Vertical CVD apparatus for forming silicon-germanium film
TOKYO ELECTRON LTD337 citations98
USD404370SJan 19, 1999
Cap for use in a semiconductor wafer heat processing apparatus
TOKYO ELECTRON LTD476 citations97
US7938080B2May 10, 2011
Method for using film formation apparatus
TOKYO ELECTRON LTD8 citations83
US7494943B2Feb 24, 2009
Method for using film formation apparatus
TOKYO ELECTRON LTD10 citations83
US7273818B2Sep 25, 2007
Film formation method and apparatus for semiconductor process
TOKYO ELECTRON LTD7 citations73
USD404374SJan 19, 1999
Fin for use in a semiconductor wafer heat processing apparatus
TOKYO ELECTRON LTD6 citations72
USD404373SJan 19, 1999
Fin for use in a semiconductor wafer heat processing apparatus
TOKYO ELECTRON LTD4 citations61