Inventor
HO BANG-CHING
TW10 patents
⚠️ This page may combine multiple inventors who share the name “HO BANG-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
9 patentsUS6982135B2Jan 3, 2006
Pattern compensation for stitching
TAIWAN SEMICONDUCTOR MFG54 citations95
US7196005B2Mar 27, 2007
Dual damascene process with dummy features
TAIWAN SEMICONDUCTOR MFG17 citations82
US7119035B2Oct 10, 2006
Method using specific contact angle for immersion lithography
TAIWAN SEMICONDUCTOR MFG5 citations72
US7611825B2Nov 3, 2009
Photolithography method to prevent photoresist pattern collapse
TAIWAN SEMICONDUCTOR MFG4 citations62
US7452822B2Nov 18, 2008
Via plug formation in dual damascene process
TAIWAN SEMICONDUCTOR MFG6 citations62
US7135259B2Nov 14, 2006
Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
TAIWAN SEMICONDUCTOR MFG4 citations62
US7948096B2May 24, 2011
Semiconductor using specific contact angle for immersion lithography
TAIWAN SEMICONDUCTOR MFG2 citations61
US7751025B2Jul 6, 2010
Scatterometric method of monitoring hot plate temperature and facilitating critical dimension control
TAIWAN SEMICONDUCTOR MFG0 citations52
US7279793B2Oct 9, 2007
System and method for manufacturing semiconductor devices using an anti-reflective coating layer
TAIWAN SEMICONDUCTOR MFG0 citations51