Inventor
AMETOWOBLA MAWULI
DE10 patents
Patents
10 patentsUS10556789B2Feb 11, 2020
Laser resealing with stress-reducing prestructuring
BOSCH GMBH ROBERT2 citations71
US9919919B2Mar 20, 2018
Laser reseal including an additional layer and alloy formation
BOSCH GMBH ROBERT5 citations71
US10207366B2Feb 19, 2019
Laser reseal including optimized intensity distribution
BOSCH GMBH ROBERT2 citations70
US10017375B2Jul 10, 2018
Structures for reducing and preventing stress and tensions during processing of silicon with the aid of melting by a laser
BOSCH GMBH ROBERT2 citations69
US10793428B2Oct 6, 2020
Sensor element having laser-activated getter material
BOSCH GMBH ROBERT0 citations49
US11851324B2Dec 26, 2023
Method for sealing entries in a MEMS element
BOSCH GMBH ROBERT0 citations48
US11084716B2Aug 10, 2021
Stress reduction during laser resealing through a temperature increase
BOSCH GMBH ROBERT0 citations48
US9862597B2Jan 9, 2018
Laser beam deflection for targeted energy deposition
BOSCH GMBH ROBERT1 citations48
US10752498B2Aug 25, 2020
MEMS component having two different internal pressures
BOSCH GMBH ROBERT0 citations40
US9914640B2Mar 13, 2018
Targeted control of the absorption behavior during laser resealing
BOSCH GMBH ROBERT0 citations38