Inventor
YIM EUN-TAEK
KR3 patents
Patents
3 patentsUS7201807B2Apr 10, 2007
Method for cleaning a deposition chamber and deposition apparatus for performing in situ cleaning
SAMSUNG ELECTRONICS CO LTD8 citations72
US6989338B2Jan 24, 2006
Method for forming a multi-layered structure of a semiconductor device and methods for forming a capacitor and a gate insulation layer using the multi-layered structure
SAMSUNG ELECTRONICS CO LTD10 citations71
US8039054B2Oct 18, 2011
Layer deposition methods
SAMSUNG ELECTRONICS CO LTD2 citations60