Inventor
CHENG TING-YA
TW8 patents
Patents
8 patentsUS11860544B2Jan 2, 2024
Target control in extreme ultraviolet lithography systems using aberration of reflection image
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11800626B2Oct 24, 2023
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11340531B2May 24, 2022
Target control in extreme ultraviolet lithography systems using aberration of reflection image
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11452197B2Sep 20, 2022
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12133319B2Oct 29, 2024
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11212903B2Dec 28, 2021
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12114412B2Oct 8, 2024
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12332571B2Jun 17, 2025
Target control in extreme ultraviolet lithography systems using aberration of reflection image
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60