Inventor
CHANG HAN-LUNG
TW54 patents
Patents
50 patentsUS10524345B2Dec 31, 2019
Residual gain monitoring and reduction for EUV drive laser
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US11437161B1Sep 6, 2022
Lithography apparatus and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11029613B2Jun 8, 2021
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11013097B2May 18, 2021
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10980100B2Apr 13, 2021
Residual gain monitoring and reduction for EUV drive laser
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10719020B2Jul 21, 2020
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations73
US10509324B2Dec 17, 2019
Light source for lithography exposure process
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10338475B2Jul 2, 2019
Light source for lithography exposure process
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10165664B1Dec 25, 2018
Apparatus for decontaminating windows of an EUV source module
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations73
US11698591B2Jul 11, 2023
System and method of discharging an EUV mask
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11687011B2Jun 27, 2023
Reticle carrier and associated methods
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11528798B2Dec 13, 2022
Replacement method for droplet generator
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11470710B2Oct 11, 2022
EUV light source and apparatus for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US10880980B2Dec 29, 2020
EUV light source and apparatus for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10670970B1Jun 2, 2020
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11860544B2Jan 2, 2024
Target control in extreme ultraviolet lithography systems using aberration of reflection image
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11800626B2Oct 24, 2023
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US11592754B2Feb 28, 2023
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11340531B2May 24, 2022
Target control in extreme ultraviolet lithography systems using aberration of reflection image
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11720035B2Aug 8, 2023
Mitigating long-term energy decay of laser devices
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US11452197B2Sep 20, 2022
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12302484B2May 13, 2025
Droplet generator and method of servicing extreme ultraviolet imaging tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12189311B2Jan 7, 2025
Reticle carrier and associated methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12193136B2Jan 7, 2025
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12133319B2Oct 29, 2024
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12028959B2Jul 2, 2024
EUV light source and apparatus for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11997778B2May 28, 2024
Replacement and refill method for droplet generator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11792909B2Oct 17, 2023
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11737200B2Aug 22, 2023
Residual gain monitoring and reduction for EUV drive laser
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11681234B2Jun 20, 2023
Mask for attracting charged particles and method for using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11644759B2May 9, 2023
Droplet generator and method of servicing extreme ultraviolet radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11617255B2Mar 28, 2023
Droplet generator and method of servicing extreme ultraviolet imaging tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11599030B2Mar 7, 2023
Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11212903B2Dec 28, 2021
Apparatus and method for generating extreme ultraviolet radiation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11153958B2Oct 19, 2021
Extreme ultraviolet photolithography method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11134558B2Sep 28, 2021
Droplet generator assembly and method for using the same and radiation source apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11086225B2Aug 10, 2021
Lithography system and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11067906B2Jul 20, 2021
Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11032897B2Jun 8, 2021
Refill and replacement method for droplet generator
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10852191B2Dec 1, 2020
Light source system and polarization angle adjusting method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10779387B2Sep 15, 2020
Extreme ultraviolet photolithography system and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US10331035B2Jun 25, 2019
Light source for lithography exposure process
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US12298664B2May 13, 2025
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12114412B2Oct 8, 2024
Shock wave visualization for extreme ultraviolet plasma optimization
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11921431B2Mar 5, 2024
Advanced load port for photolithography mask inspection tool
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12347997B2Jul 1, 2025
Methods and systems for aligning master oscillator power amplifier systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12332571B2Jun 17, 2025
Target control in extreme ultraviolet lithography systems using aberration of reflection image
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12147166B2Nov 19, 2024
Mitigating long-term energy decay of laser devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11973302B2Apr 30, 2024
Methods and systems for aligning master oscillator power amplifier systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11588293B2Feb 21, 2023
Methods and systems for aligning master oscillator power amplifier systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
Showing the top 50 of 54 patents by PatentIndex Score.