Inventor
IKENO YASUNORI
US5 patents
⚠️ This page may combine multiple inventors who share the name “IKENO YASUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OLYMPUS CORP
3 patentsUS7102743B2Sep 5, 2006
Semiconductor wafer inspection apparatus
OLYMPUS CORP26 citations90
US7369237B2May 6, 2008
Substrate processing apparatus and substrate processing system
OLYMPUS CORP4 citations60
US7308329B2Dec 11, 2007
Method and apparatus for inspecting semiconductor wafer
OLYMPUS CORP6 citations55