Inventor · disambiguated record
Kazuaki Mukai
Also filed as: MUKAI KAZUAKI
3 granted patents·0 citations·filing 2014–2023
45Inventor score
Top patents by PatentIndex Score
3 records- 0178US12384863B2Polymer, resist composition, method for manufacturing substrate having pattern formed therein, and (meth)acrylic ester and production method thereforMITSUBISHI CHEM CORP·Filed 2023·Granted Aug 12, 2025·0 cites·17 claims
- 0266US11845822B2Polymer, resist composition, method for manufacturing substrate having pattern formed therein, and (meth) acrylic ester and production method thereforMITSUBISHI CHEM CORP·Filed 2020·Granted Dec 19, 2023·0 cites·14 claims
- 0348US9223213B2Method of manufacturing polymer for lithography, method of manufacturing resist composition, and method of manufacturing substrate having patternMITSUBISHI RAYON CO·Filed 2014·Granted Dec 29, 2015·0 cites·9 claims
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