Inventor · disambiguated record

Amo Chen

Also filed as: CHEN AMO · CHEN AMÖ

4 granted patents·15 citations·filing 2015–2022

72Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD4

Top patents by PatentIndex Score

4 records

0193US10534256B2Pellicle assembly and method for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 14, 2020·6 cites·19 claims
0293US9759997B2Pellicle assembly and method for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 12, 2017·7 cites·20 claims
0390US11294274B2Pellicle assembly and method for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 5, 2022·2 cites·19 claims
0479US11914286B2Pellicle assembly and method for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 27, 2024·0 cites·20 claims

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