Inventor
Caron James Eugene
US5 patents
Patents
5 patentsUS10699878B2Jun 30, 2020
Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring
LAM RES CORP12 citations83
US10727089B2Jul 28, 2020
Systems and methods for selectively etching film
LAM RES CORP4 citations71
US10147588B2Dec 4, 2018
System and method for increasing electron density levels in a plasma of a substrate processing system
LAM RES CORP5 citations71
US12362159B2Jul 15, 2025
Systems and methods for controlling a plasma sheath characteristic
LAM RES CORP0 citations60
US10438833B2Oct 8, 2019
Wafer lift ring system for wafer transfer
LAM RES CORP1 citations60