Inventor
PEETHALA BROWN C
US13 patents
⚠️ This page may combine multiple inventors who share the name “PEETHALA BROWN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS9349687B1May 24, 2016
Advanced manganese/manganese nitride cap/etch mask for air gap formation scheme in nanocopper low-K interconnect
IBM96 citations98
US9613862B2Apr 4, 2017
Chamferless via structures
IBM14 citations91
US9390967B2Jul 12, 2016
Method for residue-free block pattern transfer onto metal interconnects for air gap formation
IBM9 citations84
US10032668B2Jul 24, 2018
Chamferless via structures
IBM4 citations82
US9190285B1Nov 17, 2015
Rework and stripping of complex patterning layers using chemical mechanical polishing
IBM11 citations82
US9508560B1Nov 29, 2016
SiARC removal with plasma etch and fluorinated wet chemical solution combination
IBM4 citations72
US10388565B2Aug 20, 2019
Chamferless via structures
IBM1 citations71
US10957588B2Mar 23, 2021
Chamferless via structures
IBM0 citations61
US10937694B2Mar 2, 2021
Chamferless via structures
IBM0 citations61
US10903118B2Jan 26, 2021
Chamferless via structures
IBM0 citations61
US9934980B2Apr 3, 2018
Rework and stripping of complex patterning layers using chemical mechanical polishing
IBM0 citations50
US9378966B2Jun 28, 2016
Selective etching of silicon wafer
IBM1 citations48