Inventor
ANGELOV IVELIN
US13 patents
⚠️ This page may combine multiple inventors who share the name “ANGELOV IVELIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
10 patentsUS10699878B2Jun 30, 2020
Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring
LAM RES CORP12 citations83
US9812349B2Nov 7, 2017
Control of the incidence angle of an ion beam on a substrate
LAM RES CORP8 citations83
US10651015B2May 12, 2020
Variable depth edge ring for etch uniformity control
LAM RES CORP7 citations80
US10825659B2Nov 3, 2020
Substrate processing chamber including multiple gas injection points and dual injector
LAM RES CORP8 citations79
US11469079B2Oct 11, 2022
Ultrahigh selective nitride etch to form FinFET devices
LAM RES CORP3 citations71
US10727089B2Jul 28, 2020
Systems and methods for selectively etching film
LAM RES CORP4 citations71
US10147588B2Dec 4, 2018
System and method for increasing electron density levels in a plasma of a substrate processing system
LAM RES CORP5 citations71
US9679749B2Jun 13, 2017
Gas distribution device with actively cooled grid
LAM RES CORP4 citations68
US10438833B2Oct 8, 2019
Wafer lift ring system for wafer transfer
LAM RES CORP1 citations60
US11342163B2May 24, 2022
Variable depth edge ring for etch uniformity control
LAM RES CORP0 citations58