P

Inventor

SAPIENS NOAM

US45 patents
⚠️ This page may combine multiple inventors who share the name “SAPIENS NOAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

25 patents
US10072921B2Sep 11, 2018

Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element

KLA TENCOR CORP17 citations93
US9518916B1Dec 13, 2016

Compressive sensing for metrology

KLA TENCOR CORP38 citations93
US9739702B2Aug 22, 2017

Symmetric target design in scatterometry overlay metrology

KLA TENCOR CORP31 citations92
US10401738B2Sep 3, 2019

Overlay metrology using multiple parameter configurations

KLA TENCOR CORP14 citations86
US9816810B2Nov 14, 2017

Measurement of multiple patterning parameters

KLA TENCOR CORP11 citations84
US9784690B2Oct 10, 2017

Apparatus, techniques, and target designs for measuring semiconductor parameters

KLA TENCOR CORP14 citations84
US9490182B2Nov 8, 2016

Measurement of multiple patterning parameters

KLA TENCOR CORP12 citations84
US10101676B2Oct 16, 2018

Spectroscopic beam profile overlay metrology

KLA TENCOR CORP15 citations83
US10591406B2Mar 17, 2020

Symmetric target design in scatterometry overlay metrology

KLA TENCOR CORP6 citations82
US9581430B2Feb 28, 2017

Phase characterization of targets

KLA TENCOR CORP15 citations82
US10612916B2Apr 7, 2020

Measurement of multiple patterning parameters

KLA TENCOR CORP4 citations73
US10107765B2Oct 23, 2018

Apparatus, techniques, and target designs for measuring semiconductor parameters

KLA TENCOR CORP3 citations73
US9645079B2May 9, 2017

Structured illumination for contrast enhancement in overlay metrology

KLA TENCOR CORP2 citations73
US9546946B2Jan 17, 2017

Metrology target indentification, design and verification

KLA TENCOR CORP2 citations73
US10365211B2Jul 30, 2019

Systems and methods for metrology beam stabilization

KLA TENCOR CORP6 citations72
US10690602B2Jun 23, 2020

Methods and systems for measurement of thick films and high aspect ratio structures

KLA TENCOR CORP3 citations71
US10648796B2May 12, 2020

Optical metrology with small illumination spot size

KLA TENCOR CORP3 citations71
US10261014B2Apr 16, 2019

Near field metrology

KLA TENCOR CORP2 citations71
US9915524B2Mar 13, 2018

Optical metrology with small illumination spot size

KLA TENCOR CORP3 citations71
US9739719B2Aug 22, 2017

Measurement systems having linked field and pupil signal detection

KLA TENCOR CORP6 citations71
US10663392B2May 26, 2020

Variable aperture mask

KLA TENCOR CORP1 citations60
US10274425B2Apr 30, 2019

Structured illumination for contrast enhancement in overlay metrology

KLA TENCOR CORP0 citations52
US9255895B2Feb 9, 2016

Angle-resolved antisymmetric scatterometry

KLA TENCOR CORP0 citations52
US10234271B2Mar 19, 2019

Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector

KLA TENCOR CORP0 citations51
US10062157B2Aug 28, 2018

Compressive sensing for metrology

KLA TENCOR CORP1 citations51

EYEQUE INC

9 patents

MANASSEN AMNON

3 patents

KANDEL DANIEL

2 patents

SERRI JOHN

2 patents

KLA CORP

2 patents

SELIGSON JOEL

1 patent

SAPIENS NOAM

1 patent