Inventor
PETERLINZ KEVIN A
US9 patents
⚠️ This page may combine multiple inventors who share the name “PETERLINZ KEVIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
8 patentsUS10072921B2Sep 11, 2018
Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element
KLA TENCOR CORP17 citations93
US10438825B2Oct 8, 2019
Spectral reflectometry for in-situ process monitoring and control
KLA TENCOR CORP8 citations83
US10101676B2Oct 16, 2018
Spectroscopic beam profile overlay metrology
KLA TENCOR CORP15 citations83
US9535018B2Jan 3, 2017
Combined x-ray and optical metrology
KLA TENCOR CORP7 citations83
US10690602B2Jun 23, 2020
Methods and systems for measurement of thick films and high aspect ratio structures
KLA TENCOR CORP3 citations71
US10648796B2May 12, 2020
Optical metrology with small illumination spot size
KLA TENCOR CORP3 citations71
US9915524B2Mar 13, 2018
Optical metrology with small illumination spot size
KLA TENCOR CORP3 citations71
US10234271B2Mar 19, 2019
Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector
KLA TENCOR CORP0 citations51