Inventor
YANG DENGLIANG
US16 patents
⚠️ This page may combine multiple inventors who share the name “YANG DENGLIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
12 patentsUS9837286B2Dec 5, 2017
Systems and methods for selectively etching tungsten in a downstream reactor
LAM RES CORP104 citations96
US9640409B1May 2, 2017
Self-limited planarization of hardmask
LAM RES CORP22 citations93
US9515156B2Dec 6, 2016
Air gap spacer integration for improved fin device performance
LAM RES CORP42 citations92
US11694911B2Jul 4, 2023
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP7 citations83
US12272571B2Apr 8, 2025
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP1 citations72
US12272570B2Apr 8, 2025
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP1 citations72
US12211709B2Jan 28, 2025
Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead
LAM RES CORP1 citations72
US10267728B2Apr 23, 2019
Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system
LAM RES CORP3 citations72
US11469079B2Oct 11, 2022
Ultrahigh selective nitride etch to form FinFET devices
LAM RES CORP3 citations71
US10727089B2Jul 28, 2020
Systems and methods for selectively etching film
LAM RES CORP4 citations71
US10147588B2Dec 4, 2018
System and method for increasing electron density levels in a plasma of a substrate processing system
LAM RES CORP5 citations71
US10192751B2Jan 29, 2019
Systems and methods for ultrahigh selective nitride etch
LAM RES CORP1 citations61