Inventor
KLOCEK JOLANTA
AT3 patents
Patents
3 patentsUS11071210B2Jul 20, 2021
Anisotropic etching using highly branched polymers
AT & S AUSTRIA TECH & SYSTEMTECHNIK AG0 citations55
US11937379B2Mar 19, 2024
Anisotropic etching using photosensitive compound
AT & S AUSTRIA TECH & SYSTEMTECHNIK AG0 citations50
US11266022B2Mar 1, 2022
Anisotropic etching using photopolymerizable compound
AT & S AUSTRIA TECH & SYSTEMTECHNIK AG0 citations50