Inventor
CHANG TING-KUI
TW19 patents
Patents
19 patentsUS10269555B2Apr 23, 2019
Post-CMP cleaning and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US11211289B2Dec 28, 2021
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10643892B2May 5, 2020
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9962805B2May 8, 2018
Chemical mechanical polishing apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US9576789B2Feb 21, 2017
Apparatus, method, and composition for far edge wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US12170195B2Dec 17, 2024
Post-CMP cleaning and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12068195B2Aug 20, 2024
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11728157B2Aug 15, 2023
Post-CMP cleaning and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11710659B2Jul 25, 2023
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11322345B2May 3, 2022
Post-CMP cleaning and apparatus
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12002684B2Jun 4, 2024
Methods for chemical mechanical polishing and forming interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11705324B2Jul 18, 2023
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11658065B2May 23, 2023
Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11508585B2Nov 22, 2022
Methods for chemical mechanical polishing and forming interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10998184B2May 4, 2021
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12444646B2Oct 14, 2025
Devices with reduced capacitances
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12046506B2Jul 23, 2024
Devices with reduced capacitances
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12543553B2Feb 3, 2026
Forming liners to facilitate the formation of copper-containing vias in advanced technology nodes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10325772B2Jun 18, 2019
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50