Inventor
KO CHENG-YUAN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “KO CHENG-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
3 patentsUS10294399B2May 21, 2019
Composition and method for polishing silicon carbide
CABOT MICROELECTRONICS CORP0 citations48
US9828574B2Nov 28, 2017
Cleaning composition and method for cleaning semiconductor wafers after CMP
CABOT MICROELECTRONICS CORP0 citations43
US10100272B2Oct 16, 2018
Cleaning composition following CMP and methods related thereto
CABOT MICROELECTRONICS CORP0 citations37