Inventor
MENGER JASPER
NL9 patents
Patents
9 patentsUS10274834B2Apr 30, 2019
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV15 citations93
US9946165B2Apr 17, 2018
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV19 citations93
US10642162B2May 5, 2020
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV8 citations83
US11940740B2Mar 26, 2024
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV2 citations72
US10859930B2Dec 8, 2020
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing
ASML NETHERLANDS BV1 citations71
US10495990B2Dec 3, 2019
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing
ASML NETHERLANDS BV1 citations66
US12287584B2Apr 29, 2025
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11385550B2Jul 12, 2022
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11300891B2Apr 12, 2022
Methods and apparatus for calculating substrate model parameters and controlling lithographic processing
ASML NETHERLANDS BV0 citations60