Inventor
LYULINA IRINA
NL11 patents
⚠️ This page may combine multiple inventors who share the name “LYULINA IRINA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS10274834B2Apr 30, 2019
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV15 citations93
US9946165B2Apr 17, 2018
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV19 citations93
US10642162B2May 5, 2020
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV8 citations83
US9291916B2Mar 22, 2016
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
ASML NETHERLANDS BV5 citations83
US11940740B2Mar 26, 2024
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV2 citations72
US9454084B2Sep 27, 2016
Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system
ASML NETHERLANDS BV5 citations72
US9753377B2Sep 5, 2017
Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus
ASML NETHERLANDS BV2 citations69
US12287584B2Apr 29, 2025
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62
US11385550B2Jul 12, 2022
Methods and apparatus for obtaining diagnostic information relating to an industrial process
ASML NETHERLANDS BV0 citations62