Inventor

XU JINJI

CN2 patents

Patents

2 patents

US12412731B2Sep 9, 2025

Coil structure and plasma processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47

US12387906B2Aug 12, 2025

Coil structure for generating plasma and semiconductor equipment

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47