Inventor

CHOI YOUNSOK

KR4 patents

Patents

4 patents

US12537176B2Jan 27, 2026

Plasma diagnostic apparatus and operating method thereof

SAMSUNG ELECTRONICS CO LTD0 citations59

US12444590B2Oct 14, 2025

Plasma sensor module

SAMSUNG ELECTRONICS CO LTD0 citations54

US12537177B2Jan 27, 2026

Plasma diagnostic circuit including variable amplification unit and method of operating the same

SAMSUNG ELECTRONICS CO LTD0 citations49

US11169449B2Nov 9, 2021

Measuring apparatus for vacuum chamber and measuring system including the same

SAMSUNG ELECTRONICS CO LTD0 citations45