Inventor
TAKIGAWA TADAHIRO
15 patents
⚠️ This page may combine multiple inventors who share the name “TAKIGAWA TADAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SHIBAURA ELECTRIC CO
9 patentsUS4457803AJul 3, 1984
Processing method using a focused ion beam
TOKYO SHIBAURA ELECTRIC CO106 citations96
US4430570AFeb 7, 1984
Electron beam exposing apparatus
TOKYO SHIBAURA ELECTRIC CO27 citations92
US4321510AMar 23, 1982
Electron beam system
TOKYO SHIBAURA ELECTRIC CO25 citations82
US4199689AApr 22, 1980
Electron beam exposing method and electron beam apparatus
TOKYO SHIBAURA ELECTRIC CO29 citations82
US4080618AMar 21, 1978
Insulated-gate field-effect transistor
TOKYO SHIBAURA ELECTRIC CO24 citations81
US4481042ANov 6, 1984
Ion implantation method
TOKYO SHIBAURA ELECTRIC CO15 citations74
US4424448AJan 3, 1984
Electron beam apparatus
TOKYO SHIBAURA ELECTRIC CO12 citations74
US4363995ADec 14, 1982
Electron gun
TOKYO SHIBAURA ELECTRIC CO13 citations73
US4530064AJul 16, 1985
Exposure method utilizing an energy beam
TOKYO SHIBAURA ELECTRIC CO6 citations61
TOSHIBA KK
5 patentsUS5429730AJul 4, 1995
Method of repairing defect of structure
TOSHIBA KK114 citations97
US5639699AJun 17, 1997
Focused ion beam deposition using TMCTS
TOSHIBA KK62 citations96
US5083033AJan 21, 1992
Method of depositing an insulating film and a focusing ion beam apparatus
TOSHIBA KK80 citations95
US4712013ADec 8, 1987
Method of forming a fine pattern with a charged particle beam
TOSHIBA KK74 citations95
US5909030AJun 1, 1999
Pattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatus
TOSHIBA KK45 citations92