Inventor
ISHIKAWA ICHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “ISHIKAWA ICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AGC INC
7 patentsUS12216397B2Feb 4, 2025
Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof
AGC INC2 citations73
US11914284B2Feb 27, 2024
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC3 citations72
US11822229B2Nov 21, 2023
Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof
AGC INC2 citations72
US12204240B2Jan 21, 2025
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations60
US12222640B2Feb 11, 2025
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations59
US12105412B2Oct 1, 2024
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC0 citations59
US11829065B2Nov 28, 2023
Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask
AGC INC1 citations59