Inventor
TOCHIHARA KAZUMOTO
JP3 patents
Patents
3 patentsUS5168021ADec 1, 1992
Method for exposing predetermined area of peripheral part of wafer
USHIO ELECTRIC INC33 citations89
US6700643B2Mar 2, 2004
Device for exposure of a peripheral area of a film circuit board
USHIO ELECTRIC INC5 citations60
US6721037B2Apr 13, 2004
Device for exposure of a peripheral area of a wafer
USHIO ELECTRIC INC5 citations59