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Inventor
SHINNEMAN FRANK M
US
2 patents
Patents
2 patents
US5449445A
Sep 12, 1995
Sputtering target with machine readable indicia
MATERIALS RESEARCH CORP
15 citations
78
US5284561A
Feb 8, 1994
Method and apparatus for sputter coating employing machine readable indicia carried by target assembly
MATERIALS RESEARCH CORP
19 citations
78