Inventor
KURONO YOICHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KURONO YOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS5779803AJul 14, 1998
Plasma processing apparatus
TOKYO ELECTRON LTD83 citations94
US5217560AJun 8, 1993
Vertical type processing apparatus
TOKYO ELECTRON LTD103 citations94
US5578164ANov 26, 1996
Plasma processing apparatus and method
TOKYO ELECTRON LTD30 citations91
US5440206AAug 8, 1995
Plasma processing apparatus comprising means for generating rotating magnetic field
TOKYO ELECTRON LTD23 citations90
US6558506B1May 6, 2003
Etching system and etching chamber
TOKYO ELECTRON LTD48 citations88