P

Inventor

GAO PEI-YUAN

US17 patents
⚠️ This page may combine multiple inventors who share the name “GAO PEI-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MICRO DEVICES INC

13 patents
US6653735B1Nov 25, 2003

CVD silicon carbide layer as a BARC and hard mask for gate patterning

ADVANCED MICRO DEVICES INC57 citations96
US7033960B1Apr 25, 2006

Multi-chamber deposition of silicon oxynitride film for patterning

ADVANCED MICRO DEVICES INC22 citations92
US6803313B2Oct 12, 2004

Method for forming a hardmask employing multiple independently formed layers of a pecvd material to reduce pinholes

ADVANCED MICRO DEVICES INC19 citations92
US6764949B2Jul 20, 2004

Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication

ADVANCED MICRO DEVICES INC53 citations92
US7060554B2Jun 13, 2006

PECVD silicon-rich oxide layer for reduced UV charging

ADVANCED MICRO DEVICES INC12 citations84
US6403385B1Jun 11, 2002

Method of inspecting a semiconductor wafer for defects

ADVANCED MICRO DEVICES INC18 citations76
US6489253B1Dec 3, 2002

Method of forming a void-free interlayer dielectric (ILD0) for 0.18-μm flash memory technology and semiconductor device thereby formed

ADVANCED MICRO DEVICES INC6 citations73
US6410461B1Jun 25, 2002

Method of depositing sion with reduced defects

ADVANCED MICRO DEVICES INC8 citations73
US6369453B1Apr 9, 2002

Semiconductor wafer for measurement and recordation of impurities in semiconductor insulators

ADVANCED MICRO DEVICES INC2 citations61
US6297065B1Oct 2, 2001

Method to rework device with faulty metal stack layer

ADVANCED MICRO DEVICES INC6 citations61
US7023046B2Apr 4, 2006

Undoped oxide liner/BPSG for improved data retention

ADVANCED MICRO DEVICES INC3 citations60
US7183198B2Feb 27, 2007

Method for forming a hardmask employing multiple independently formed layers of a capping material to reduce pinholes

ADVANCED MICRO DEVICES INC0 citations52
US6627973B1Sep 30, 2003

Void-free interlayer dielectric (ILD0) for 0.18-micron flash memory semiconductor device

ADVANCED MICRO DEVICES INC0 citations52

SPANSION LLC

2 patents

FASL LLC

1 patent

NICKEL ALEXANDER H

1 patent