Inventor
GAO PEI-YUAN
US17 patents
⚠️ This page may combine multiple inventors who share the name “GAO PEI-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
13 patentsUS6653735B1Nov 25, 2003
CVD silicon carbide layer as a BARC and hard mask for gate patterning
ADVANCED MICRO DEVICES INC57 citations96
US7033960B1Apr 25, 2006
Multi-chamber deposition of silicon oxynitride film for patterning
ADVANCED MICRO DEVICES INC22 citations92
US6803313B2Oct 12, 2004
Method for forming a hardmask employing multiple independently formed layers of a pecvd material to reduce pinholes
ADVANCED MICRO DEVICES INC19 citations92
US6764949B2Jul 20, 2004
Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabrication
ADVANCED MICRO DEVICES INC53 citations92
US7060554B2Jun 13, 2006
PECVD silicon-rich oxide layer for reduced UV charging
ADVANCED MICRO DEVICES INC12 citations84
US6403385B1Jun 11, 2002
Method of inspecting a semiconductor wafer for defects
ADVANCED MICRO DEVICES INC18 citations76
US6489253B1Dec 3, 2002
Method of forming a void-free interlayer dielectric (ILD0) for 0.18-μm flash memory technology and semiconductor device thereby formed
ADVANCED MICRO DEVICES INC6 citations73
US6410461B1Jun 25, 2002
Method of depositing sion with reduced defects
ADVANCED MICRO DEVICES INC8 citations73
US6369453B1Apr 9, 2002
Semiconductor wafer for measurement and recordation of impurities in semiconductor insulators
ADVANCED MICRO DEVICES INC2 citations61
US6297065B1Oct 2, 2001
Method to rework device with faulty metal stack layer
ADVANCED MICRO DEVICES INC6 citations61
US7023046B2Apr 4, 2006
Undoped oxide liner/BPSG for improved data retention
ADVANCED MICRO DEVICES INC3 citations60
US7183198B2Feb 27, 2007
Method for forming a hardmask employing multiple independently formed layers of a capping material to reduce pinholes
ADVANCED MICRO DEVICES INC0 citations52
US6627973B1Sep 30, 2003
Void-free interlayer dielectric (ILD0) for 0.18-micron flash memory semiconductor device
ADVANCED MICRO DEVICES INC0 citations52