Inventor
EVANS ALLEN L
US10 patents
⚠️ This page may combine multiple inventors who share the name “EVANS ALLEN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO DEVICES INC
7 patentsUS6684122B1Jan 27, 2004
Control mechanism for matching process parameters in a multi-chamber process tool
ADVANCED MICRO DEVICES INC33 citations91
US6514865B1Feb 4, 2003
Method of reducing interlayer dielectric thickness variation feeding into a planarization process
ADVANCED MICRO DEVICES INC20 citations91
US6469518B1Oct 22, 2002
Method and apparatus for determining measurement frequency based on hardware age and usage
ADVANCED MICRO DEVICES INC22 citations91
US6291253B1Sep 18, 2001
Feedback control of deposition thickness based on polish planarization
ADVANCED MICRO DEVICES INC12 citations73
US6512991B1Jan 28, 2003
Method and apparatus for reducing deposition variation by modeling post-clean chamber performance
ADVANCED MICRO DEVICES INC9 citations72
US6271112B1Aug 7, 2001
Interlayer between titanium nitride and high density plasma oxide
ADVANCED MICRO DEVICES INC12 citations72
US5895259AApr 20, 1999
Polysilicon diffusion doping method employing a deposited doped oxide layer with a highly uniform thickness
ADVANCED MICRO DEVICES INC11 citations68